Update to Chisel 6.7, use new annotation API #1090

Job	Run time
jtag-dtm-test (freechips.rocketchip.system.WithJtagDTMSystem_freechips.rocketchip.system.DefaultC...	21m 6s
emulator (DefaultSmallConfig)	12m 46s
jtag-dtm-test (freechips.rocketchip.system.WithJtagDTMSystem_freechips.rocketchip.system.DefaultR...	19m 26s
riscv-arch-test	0s
emulator (DualBankConfig)	14m 59s
jtag-dtm-test (freechips.rocketchip.system.WithJtagDTMSystem_freechips.rocketchip.system.WithDebu...	17m 47s
riscv-tests (DefaultConfig)	19m 27s
jtag-dtm-test (freechips.rocketchip.system.WithJtagDTMSystem_freechips.rocketchip.system.WithDebu...	16m 58s
riscv-tests (DefaultBufferlessConfig)	19m 22s
riscv-tests (DefaultRV32Config)	18m 38s
emulator (DualChannelConfig)	13m 5s
riscv-tests (TinyConfig)	13m 20s
emulator (DualChannelDualBankConfig)	13m 49s
riscv-tests (DefaultFP16Config)	13m 48s
riscv-tests (DefaultBConfig)	13m 32s
riscv-tests (DefaultRV32BConfig)	13m 25s
emulator (RoccExampleConfig)	12m 55s
emulator (Edge128BitConfig)	12m 47s
emulator (Edge32BitConfig)	12m 57s
emulator (QuadChannelBenchmarkConfig)	13m 2s
emulator (EightChannelConfig)	13m 29s
emulator (DualCoreConfig)	13m 16s
emulator (MemPortOnlyConfig)	12m 48s
emulator (MMIOPortOnlyConfig)	12m 48s
emulator (CloneTileConfig)	14m 19s
emulator (HypervisorConfig)	12m 56s
	6h 12m 45s

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