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Hi Stefan,
It isn't obvious from the schematics in the SAMD51 datasheet, but I give it pretty good chances that of working. There is no option to connect the positive ADC input to GND, but you could work around that by setting the ADC MUX to connect to the output of DAC0. If you can make it work, I'll gladly merge the PR :)
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Can this work with the ATSAMD51 chips?
Vor are ther alternative libs for this?
I landed her from a search and this question:
https://arduino.stackexchange.com/questions/43663/built-in-capacitive-touch-detection-with-samd21-development-board-arduino-zero#43694
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